High-purity Inorganic Chemicals High-Purity hexachlorodisilane
Manufactured using our unique technologies, HCD occupies the top market share globally due to its high quality and stability.
- Product name
- HCD
- Information technology
- Semiconductors Electronic materials
*9:00 am - 5:00 pm (except weekends and holidays)
Features
High-purity hexachlorodisilane (HCD) has high reactivity and storage stability and can be used as a silicon precursor for low-temperature deposition. Suited for SiO2 and SiNx deposition for semiconductors, this material is essential for forming microfabricated wiring on the latest generation of semiconductors.
Usage
High-purity hexachlorodisilane (HCD) can be used as a silicon precursor for high-precision SiOx or SiNx depositions, or SiOxNy depositions through reaction with oxygen- or nitrogen-based substances in various CVD and ALD processes.
Specifications
- Quality
High-purity product with a metal base purity of > 99.9999%. - Container
The product is supplied in various metal cylinders.
*9:00 am - 5:00 pm (except weekends and holidays)