High-purity Inorganic Chemicals High-Purity hexachlorodisilane

Manufactured using our unique technologies, HCD occupies the top market share globally due to its high quality and stability.

Product name
HCD
Usage
Information technology
Semiconductors Electronic materials
Function
High purity Reactivity
Inquiries
Performance Electronics Material Department

*9:00 am - 5:00 pm (except weekends and holidays)

Features

High-purity hexachlorodisilane (HCD) has high reactivity and storage stability and can be used as a silicon precursor for low-temperature deposition. Suited for SiO2 and SiNx deposition for semiconductors, this material is essential for forming microfabricated wiring on the latest generation of semiconductors.

Usage

High-purity hexachlorodisilane (HCD) can be used as a silicon precursor for high-precision SiOx or SiNx depositions, or SiOxNy depositions through reaction with oxygen- or nitrogen-based substances in various CVD and ALD processes.

Specifications

  • Quality
    High-purity product with a metal base purity of > 99.9999%.
  • Container
    The product is supplied in various metal cylinders.
Inquiries
Performance Electronics Material Department

*9:00 am - 5:00 pm (except weekends and holidays)